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International Conferences A Dual-Model Explainable AI Framework for Root Cause Analysis of Anomalies in Semiconductor Manufacturing

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조회 170회 작성일 26-09-04 14:49

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Conference 2026 IEEE IAS Vancouver
Name Seokkyu Pyo , Donghyun Koo , Beomseok Kim, Yuna Song, Jihoon Hong, Kuhyun Lee, Suhwan Park, Mihee Lee, Donghee Lee
Year 2026

Diagnosing Out-of-Spec (OOS) anomalies in anonymized semiconductor manufacturing is highly challenging. We propose a Dual-Model Explainable AI framework for post hoc root cause analysis, featuring a Standard Model for global trends and a Tail-Focused Model—optimized via dynamic weighted tail loss—for extreme OOS distributions. By applying SHapley Additive exPlanations (SHAP), this architecture isolates global main effects and localized cross-process interactions. Human-in-the-loop validation by field engineers demonstrated that the Standard Model effectively verified known factors, whereas the Tail-Focused Model significantly reduced OOS prediction error and discovered novel, actionable interactions, offering a robust diagnostic tool for yield enhancement. Experimentally, the Tail-Focused Model reduced OOS RMSE from 0.261 to 0.181 and uncovered 56 previously unknown cross-process interactions validated as physically actionable by domain engineers. 

Total 106건 1 페이지
Presentation 목록
No. 제목
106
International Conferences

2026 IEEE International Conference on IEEM Singapore

2026년

23일 전 151
105
104
103
열람중
101
100
99
Domestic Conferences

2026 대한산업공학회 춘계학술대회

2026년

26.07.23 261
98
97
96
95
94
93
92 Link

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