International Conferences A Dual-Model Explainable AI Framework for Root Cause Analysis of Anomalies in Semiconductor Manufacturing
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조회 170회 작성일 26-09-04 14:49
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| Conference | 2026 IEEE IAS Vancouver |
|---|---|
| Name | Seokkyu Pyo , Donghyun Koo , Beomseok Kim, Yuna Song, Jihoon Hong, Kuhyun Lee, Suhwan Park, Mihee Lee, Donghee Lee |
| Year | 2026 |
Diagnosing Out-of-Spec (OOS) anomalies in anonymized semiconductor manufacturing is highly challenging. We propose a Dual-Model Explainable AI framework for post hoc root cause analysis, featuring a Standard Model for global trends and a Tail-Focused Model—optimized via dynamic weighted tail loss—for extreme OOS distributions. By applying SHapley Additive exPlanations (SHAP), this architecture isolates global main effects and localized cross-process interactions. Human-in-the-loop validation by field engineers demonstrated that the Standard Model effectively verified known factors, whereas the Tail-Focused Model significantly reduced OOS prediction error and discovered novel, actionable interactions, offering a robust diagnostic tool for yield enhancement. Experimentally, the Tail-Focused Model reduced OOS RMSE from 0.261 to 0.181 and uncovered 56 previously unknown cross-process interactions validated as physically actionable by domain engineers.