International Papers Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066”
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조회 302회 작성일 24-05-18 15:49
조회 302회 작성일 24-05-18 15:49
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| Journal | Materials & Design |
|---|---|
| Name | Ganggyu Lee, Kangchun Lee, Jinok Moon, Taeseup Song, Dong-Hee Lee, Ungyu Paik |
| Year | 2024 |
We would like to respond to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, https://doi.org/10.1016/j.matdes.2016.12.066″. Mangindaan et al. raised concerns about deriving the 2nd order equations for optimizing the W-pattern CMP slurry compositions. However, we clarify that there were no errors in deriving the 2nd order equations obtained by employing response surface methodology using a face-centered design model.