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International Papers A method for wafer assignment in semiconductor wafer fabrication considering both quality and productivity perspectives

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조회 379회 작성일 24-02-01 23:18

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Journal Journal of Manufacturing Systems, 52, 23-31
Name Lee, D., Lee, C., Choi, S., Kim, K.
Year 2019

In the semiconductor wafer fabrication process, wafers go through a series of sequential process steps. Typically, each process step has several machines, and the wafers are assigned to one whenever they enter the process step. When assigning wafers to machines, it is important to consider both the quality and productivity perspectives. Major semiconductor companies in Korea have recently implemented a wafer assignment system to improve wafer yield, a critical measure for semiconductor quality. This system, however, does not consider the productivity perspective. This paper presents a systematic method for assigning wafers to maximize the wafer yield while satisfying a predetermined target level of productivity. A simple hypothetical example is presented to illustrate the method. 

Total 70건 3 페이지
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No. 제목
40 Link
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37
International Papers

Quality and Reliability Engineering International, 36(6), 1982-2002

2020

24.02.01 436
Link
36
International Papers

Quality and Reliability Engineering International, 36(6), 1931-1978

2020

24.02.01 360
Link
35 Link
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32
International Papers

Communications in Statistics - Theory and Methods, 49(13), 3137-3152

2020

24.02.01 370
Link
31 Link
30
Domestic Papers

Journal of the Korean Institute of Industrial Engineers, 46(5), 452-465

2020

24.02.01 388
Link
29 Link
28 Link
열람중 Link
26
International Papers

International Journal of Industrial Engineering, 26(1), 83-91

2019

24.02.01 368
Link

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